專利
| 學年 | 95 |
|---|---|
| 學期 | 2 |
| 專利開始日期 | 2007-07-19 |
| 專利結束日期 | 2007-07-19 |
| 作品名稱 | Fabrication method of nanoimprinting mold core |
| 作品名稱（其他語言） | |
| 著者 | 林清彬; Lin, Ching-bin; Cheng, Pao-yu; Lin, Hung-yi |
| 單位 | 淡江大學機械與機電工程學系 |
| 著錄名稱、卷期、頁數 | |
| 描述 | 專利國別：美國 Pub. No.: US 2007/0166874 A1 Application number: 11/626961 國際分類號：H01L21/06; H01L21/02 |
| 摘要 | A method for fabricating a nanoimprint mold core is disclosed. The method includes providing a substrate; forming on the substrate an amorphous thin film, which is transformed into a crystalline thin film upon receipt of energy, the crystalline thin film having physical and chemical characteristics different from those of the amorphous thin film; applying the energy onto a predetermined region of the amorphous thin film, to transform the amorphous thin film within the predetermined region into the crystalline thin film; etching the illuminated amorphous film, which has crystalline mark on amorphous film, and at least partially removing the area of remained amorphous thin films; performing an imprinting process on the substrate, which has the etched amorphous thin films formed; and performing a molding releasing process on the substrate, so as to obtain the nanoimprint mold core. |
| 關鍵字 | |
| 語言 | en |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/53859 ) |