專利

標題 Fabrication method of nanoimprinting mold core
學年 95
學期 2
專利開始日期 2007/07/19
專利結束日期 2007/07/19
作品名稱 Fabrication method of nanoimprinting mold core
作品名稱(其他語言)
著者 林清彬; Lin, Ching-bin; Cheng, Pao-yu; Lin, Hung-yi
單位 淡江大學機械與機電工程學系
著錄名稱、卷期、頁數
描述 專利國別:美國;Pub. No.: US 2007/0166874 A1;Application number: 11/626961;國際分類號:H01L21/06; H01L21/02
摘要 A method for fabricating a nanoimprint mold core is disclosed. The method includes providing a substrate; forming on the substrate an amorphous thin film, which is transformed into a crystalline thin film upon receipt of energy, the crystalline thin film having physical and chemical characteristics different from those of the amorphous thin film; applying the energy onto a predetermined region of the amorphous thin film, to transform the amorphous thin film within the predetermined region into the crystalline thin film; etching the illuminated amorphous film, which has crystalline mark on amorphous film, and at least partially removing the area of remained amorphous thin films; performing an imprinting process on the substrate, which has the etched amorphous thin films formed; and performing a molding releasing process on the substrate, so as to obtain the nanoimprint mold core.
關鍵字
語言 英文