期刊論文
| 學年 | 96 |
|---|---|
| 學期 | 2 |
| 出版（發表）日期 | 2008-03-01 |
| 作品名稱 | Synthesis and characterization of smooth ultrananocrystalline diamond films via low pressure bias-enhanced nucleation and growth |
| 作品名稱（其他語言） | |
| 著者 | Chen, Y. C.; Zhong, X. Y.; Konicek, A. R.; Grierson, D. S.; Tai, N. H.; 林諭男; Lin, I. N.; Kabius, B.; Hiller, J. M.; Sumant, A. V.; Carpick, R. W.; Auciello, O. |
| 單位 | 淡江大學物理學系 |
| 出版者 | American Institute of Physics (AIP) |
| 著錄名稱、卷期、頁數 | Applied Physics Letters 92(13), pp.133113(3 pages) |
| 摘要 | This letter describes the fundamental process underlying the synthesis of ultrananocrystalline diamond (UNCD) films, using a new low-pressure, heat-assisted bias-enhanced nucleation (BEN)/bias enhanced growth (BEG) technique, involving H<sub>2</sub>/CH<sub>4</sub> gas chemistry. This growth process yields UNCD films similar to those produced by the Ar-rich/CH4 chemistries, with pure diamond nanograins (3–5 nm), but smoother surfaces (~6 nm rms) and higher growth rate (~1 µm/h). Synchrotron-based x-Ray absorption spectroscopy, atomic force microscopy, and transmission electron microscopy studies on the BEN-BEG UNCD films provided information critical to understanding the nucleation and growth mechanisms, and growth condition-nanostructure-property relationships. |
| 關鍵字 | atomic force microscopy; diamond; heat treatment; nanostructured materials; nanotechnology; nucleation; transition electron microscopy; XANES |
| 語言 | en |
| ISSN | 0003-6951 |
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| 出版型式 | 紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/42020 ) |