期刊論文
| 學年 | 96 |
|---|---|
| 學期 | 2 |
| 出版（發表）日期 | 2008-04-01 |
| 作品名稱 | Surface acoustic wave properties of natural smooth ultra-nanocrystalline diamond characterized by laser-induced SAW pulse technique |
| 作品名稱（其他語言） | |
| 著者 | Lee, Y. C.; Lin, S. J.; Buck, V.; Kunze, R.; Schmidt, H.; Lin, C. Y.; Fang, W. L.; 林諭男; Lin, I-nan |
| 單位 | 淡江大學物理學系 |
| 出版者 | Elsevier |
| 著錄名稱、卷期、頁數 | Diamond and Related Materials 17(4-5), pp.446-450 |
| 摘要 | Diamond is one of the best SAW substrate candidates due to its highest sound velocity and thermal conductivity. But conventional diamond films usually express facet structure with large roughness. Ultra-nanocrystallined diamond (UNCD) films grown in a 2.45 GHz IPLAS microwave plasma enhanced chemical vapor deposition (MPECVD) system on Si (100) substrates in CH4-Ar plasma possess naturally smooth surface and are advantageous for device applications. Moreover, highly C-axis textured aluminum nitride (AlN) films can be grown by DC-sputtering directly on UNCD coated Si substrate. However, properties of UNCD films are much complex than microcrystalline diamond films, that is because this is a very complex material system with large but not fixed portion of grain boundaries and sp2/sp3 bonding. Properties of UNCD films could change dramatically with similar deposition condition and with similar morphologies. A simple and quick method to characterize the properties of these UNCD films is important and valuable. Laser-induced SAW pulse method, which is a fast and accurate SAW properties measuring system, for the investigation of mechanical and structure properties of thin films without any patterning or piezoelectric layer. |
| 關鍵字 | |
| 語言 | en |
| ISSN | 0925-9635 |
| 期刊性質 | 國外 |
| 收錄於 | |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | 否 |
| 國別 | CHE |
| 公開徵稿 | |
| 出版型式 | ,電子版 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/42026 ) |