關鍵字查詢 | 類別:會議論文 | | 關鍵字:Kinematic Aspects of View

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1 93/1 航太系 田 豐 教授 會議論文 發佈 Non-Uniformity of Wafer and Pad in CMP: Kinematic Aspects of View , [93-1] :Non-Uniformity of Wafer and Pad in CMP: Kinematic Aspects of View會議論文Non-Uniformity of Wafer and Pad in CMP: Kinematic Aspects of View田豐淡江大學航空太空工程學系臺北市:臺灣大學第二十八屆中華民國全國力學學會年會暨全國力學研討會論文集tku_id: 000100740;Made available in DSpace on 2013-03-22T07:39:40Z (GMT). No. of bitstreams: 0 Previous issue date: 2011-10-18T13:35:56Z;20140730補正 by 陸桂英en國內20041203~20041204TWN第二十八屆中華民國全國力學學會年會暨全國力學研討會臺北市, 臺灣<links><record><name>機構典藏連結</name><url>http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/62479</url></record></links>
2 93/2 航太系 田 豐 教授 會議論文 發佈 Non-Uniformity of Wafer and Pad in CMP: Kinematic Aspects of View , [93-2] :Non-Uniformity of Wafer and Pad in CMP: Kinematic Aspects of View會議論文Non-Uniformity of Wafer and Pad in CMP: Kinematic Aspects of ViewTyan, Feng淡江大學航空太空工程學系American Control Conference, 2005. Proceedings of the 2005, v.3, pp.2046-2051In this paper, we analyze the non-uniformity of sliding distance on both wafer and polishing pad from kinematic point of view. Using the Fourier series expansion, we can show that in steady state the non-uniformity is determined by the ratio between rotary speeds of platen and wafer carrier (m), and the ratio of wafer radius to the distance between the center of platen and wafer (Rc/d). In general, the non-uniformity of wafer increases with |m| and Rc/d. An important observation for polishing pad is that in two particular ranges of the ratio m, the larger Rc/d produces the smaller non-uniformity. Then a ring type polishing pad is proposed for the purpose of improving the non-uniformity of both wafer and pad. However, it turns out that the result is much wor
3 93/1 航太系 王怡仁 教授 會議論文 發佈 Non-Uniformity of Wafer and Pad in CMP: Kinematic Aspects of View , [93-1] :Non-Uniformity of Wafer and Pad in CMP: Kinematic Aspects of View會議論文Non-Uniformity of Wafer and Pad in CMP: Kinematic Aspects of View王怡仁淡江大學航空太空工程學系中山大學中國機械工程學會第二十一屆全國學術研討會論文集tku_id: 000090730;Made available in DSpace on 2013-03-22T07:39:06Z (GMT). No. of bitstreams: 0 Previous issue date: 2011-10-18T13:35:45Z;20140730補正 by 陸桂英en國內20041126~20041127中國機械工程學會; 中山大學TWN中國機械工程學會第二十一屆全國學術研討會高雄市, 臺灣<links><record><name>機構典藏連結</name><url>http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/62478</url></record></links>
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