關鍵字查詢 | 類別:會議論文 | | 關鍵字:A Gas-Leakage Sensor for PDMS Chip Frames

[第一頁][上頁]1[次頁][最末頁]目前在第 1 頁 / 共有 02 筆查詢結果
序號 學年期 教師動態
1 96/2 機電系 楊龍杰 教授 會議論文 發佈 A Gas-Leakage Sensor for PDMS Chip Frames , [96-2] :A Gas-Leakage Sensor for PDMS Chip Frames會議論文A Gas-Leakage Sensor for PDMS Chip FramesYang, Meng-Chiao; Yang, Lung-Jieh; Wang, Hsin-Hsiung淡江大學機械與機電工程學系PDMS;Gas-leakage;Diffusion coefficientProceedings of the 4th Asia Pacific Conference on Transducers and Micro-Nano Technologies (APCOT 2008),4p.National Cheng Kung University (NCKU)This paper proposes a new methodology to detect the gas-leakage and the corresponding diffusion coefficient of PDMS. We use PDMS instead of Pyrex 7740 glass to seal the backside V-groove of pressure sensor chips. We put the sensor into a pressure testing machine and pressurize with CO2 at 300 psi. By observing output voltage, the time of CO2 permeated into cavity of the sensor was easily to find. In this paper, we use two PDMS membrane with different thickness, 45.mu.m and 500.mu.m, to package the sensors and explore the gas-leakage of PDMS membrane. The mathematical model for the leaking process shows that the diffusion coefficients D are 7.49*10/sup -10/m2 /
2 96/2 機電系 楊龍杰 教授 會議論文 發佈 A gas-leakage sensor for PDMS chip frames , [96-2] :A gas-leakage sensor for PDMS chip frames會議論文A gas-leakage sensor for PDMS chip frames楊龍杰淡江大學機械與機電工程學系NCKUProc. of APCOT-2008, Tainan, TAIWAN, p.28Submitted by 龍杰 楊 (ljyang@mail.tku.edu.tw) on 2011-10-14T06:53:04Z No. of bitstreams: 0;Made available in DSpace on 2011-10-14T06:53:04Z (GMT). No. of bitstreams: 0;tku_id: 000096520en國際20080623~20080626<links><record><name>機構典藏連結</name><url>http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/60565</url></record></links>
[第一頁][上頁]1[次頁][最末頁]目前在第 1 頁 / 共有 02 筆查詢結果