管科系 牛涵錚 教授於
Increasing Detectability in Semiconductor Foundry by Multivariate Statistical Process Control
：Increasing Detectability in Semiconductor Foundry by Multivariate Statistical Process Control期刊論文Increasing Detectability in Semiconductor Foundry by Multivariate Statistical Process ControlNiu, Han-jen; Yang, Chyan; Chang, Chao-jung淡江大學經營決策學系statistical process control (SPC), advance process control (APC), fault detection and classification (FDC), Hotelling T2 , principal component analysis (PCA), semiconductor industryTotal Quality Management & Business Excellence 19(5), pp.429-440Quality has become a key determinant of success in all aspects of modern industries. It is especially prominent in the semiconductor industry. This paper reviews the contributions of statistical analysis and methods to modern quality control and improvement. The two main areas are statistical process control (SPC) and experimentation. The statistical approach is placed in the context of recent developments in quality management, with particular reference to the total quality movement.
In SPC, Hotelling T