關鍵字查詢 | 類別:期刊論文 | | 關鍵字:Fabrication and testing of thermoelectric CMOS-MEMS microgenerators with CNSs Film

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1 106/2 機電系 吳乾埼 副教授 期刊論文 發佈 Fabrication and testing of thermoelectric CMOS-MEMS microgenerators with CNSs Film , [106-2] :Fabrication and testing of thermoelectric CMOS-MEMS microgenerators with CNSs Film期刊論文Fabrication and testing of thermoelectric CMOS-MEMS microgenerators with CNSs FilmYu-Wei Chen; Chyan-Chyi Wu; Cheng-Chih Hsu; Ching-Liang Daithermoelectric;microgenerator;CMOS-MEMS;carbon nanocapsulesApplied Sciences 8(7), 1047Manufacturing and testing of a TMG (thermoelectric microgenerator) with CNCs (carbon nanocapsules) film fabricated utilizing a CMOS (complementary metal oxide semiconductor) technology are investigated. The microgenerator includes a CNCs layer, thermopiles, and thermometers. CNCs, a heat absorbing material, are coated on the microgenerator, so that the TD (temperature difference) of HP (hot part) and CP (cold part) in the thermopiles increases, resulting in an enhancement of the microgenerator OP (output power). Thermometers fabricated in the microgenerator are employed to detect the HP and CP temperature in thermopiles. In order to enhance thermopiles’ TD, the HP in thermopiles
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