關鍵字查詢 | 類別:期刊論文 | | 關鍵字:Fabricating microstructures on CVD diamond film

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序號 學年期 教師動態
1 100/1 機電系 趙崇禮 教授 期刊論文 發佈 Fabricating microstructures on CVD diamond film , [100-1] :Fabricating microstructures on CVD diamond film期刊論文Fabricating microstructures on CVD diamond filmChao, Choung-Lii; Chou, Wen-Chen; Lin, Wen-Chung; Su, Wei-Jhe; Ma, Kung-Jeng淡江大學機械與機電工程學系CVD diamond film; thermal annealing; reactive ion etching; RIE; microstructureOlney: Inderscience PublishersInternational Journal of Surface Science and Engineering 6(1/2), pp.59-70Diamond has many advanced properties which may provide potential solutions to various engineering problems. This study focuses on fabricating micro-structures on CVD diamond film. A thin layer of Au or Pt together with thermal annealing process is used to form micro–masks and reactive ion etching (RIE) method was subsequently adopted in this research to etch and fabricate micro–structures. Field emission scanning electron microscope (FESEM) and micro Raman spectroscopy were used to observe and analyse the morphology and composition of the obtained microstructures. Results show that different coated materials and thickness ca
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