教師資料查詢 | 類別: 期刊論文 | 教師: 林諭男 I-nan Lin (瀏覽個人網頁)

標題:Improvement in Tribological Properties by Modification of Grain Boundary and Microstructure of Ultrananocrystalline Diamond Films
學年101
學期2
出版(發表)日期2013/05/01
作品名稱Improvement in Tribological Properties by Modification of Grain Boundary and Microstructure of Ultrananocrystalline Diamond Films
作品名稱(其他語言)
著者Kamatchi Jothiramalingam Sankaran; Niranjan Kumar; Joji Kurian; Radhika Ramadoss; Huang-Chin Chen; Sitaram Dash; Ashok Kumar Tyagi; Lee, Chi-Young; Tai, Nyan-Hwa; Lin, I-Nan
單位淡江大學物理學系
出版者Washington, DC: American Chemical Society
著錄名稱、卷期、頁數ACS Applied Materials and Interfaces 5(9), pp.3614-3624
摘要Grain boundaries and microstructures of ultrananocrystalline diamond (UNCD) films are engineered at nanoscale by controlling the substrate temperature (TS) and/or by introducing H2 in the commonly used Ar/CH4 deposition plasma in a microwave plasma enhanced chemical vapor deposition system. A model for the grain growth is proposed. The films deposited at low TS consist of random/spherical shaped UNCD grains with well-defined grain boundaries. On increasing TS, the adhering efficiency of CH radical onto diamond lattice drops and trans-polyacetylene (t-PA) encapsulating the nanosize diamond clusters break due to hydrogen abstraction activated, rendering the diamond phase less passivated. This leads to the C2 radical further attaching to the diamond lattice, resulting in the modification of grain boundaries and promoting larger sized clustered grains with a complicated defect structure. Introduction of H2 in the plasma at low TS gives rise to elongated clustered grains that is attributed to the presence of atomic hydrogen in the plasma, preferentially etching out the t-PA attached to nanosized diamond clusters. On the basis of this model a technologically important functional property, namely tribology of UNCD films, is studied. A low friction of 0.015 is measured for the film when ultranano grains are formed, which consist of large fractions of grain boundary components of sp2/a-C and t-PA phases. The grain boundary component consists of large amounts of hydroxylic and carboxylic functional groups which passivates the covalent carbon dangling bonds, hence low friction coefficient. The improved tribological properties of films can make it a promising candidate for various applications, mainly in micro/nanoelectro mechanical system (M/NEMS), where low friction is required for high efficiency operation of devices.
關鍵字ultrananocrystalline diamond films; microstructure; grain boundary; clustered grains; trans-polyacetylene; high resolution transmission electron microscopy; tribological properties
語言英文
ISSN1944-8244
期刊性質
收錄於
產學合作
通訊作者Lin, I-Nan
審稿制度
國別美國
公開徵稿
出版型式紙本
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