教師資料查詢 | 類別: 會議論文 | 教師: 楊龍杰 Yang Lung-jieh (瀏覽個人網頁)

標題:Design and fabrication of a diaphragm type thermo-buckled microactuators
學年94
學期1
發表日期2006/01/18
作品名稱Design and fabrication of a diaphragm type thermo-buckled microactuators
作品名稱(其他語言)
著者Wang, Jiun-Min; Lin, Hung-Hua; Lin, Yue-Jheng; Ou, Yu-Cheng; Yang, Lung-Jieh; Lin, Chii-Wann; Yang, Yao-Joe; Lin, Wei-Chih
作品所屬單位淡江大學機械與機電工程學系
出版者
會議名稱Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
會議地點Zhuhai, China
摘要This study presents a novel diaphragm type thermo- buckled microactuator with only a driving voltage of 3 V and under a working temperature far below 100degC. It's a sandwich structure composed of a platinum (Pt) resistor between two parylene films with different thickness. The platinum resistor is assigned as a heating source. Therefore, the parylene diaphragm with different thicknesses of top and bottom layers is heated by the embedded Pt resistor. The non-uniform temperature rise of the parylene diaphragm not only generates an out-of-plane thermo-buckling deformation, but also induces an asymmetric deflection inclined to upward or downward direction. The maximum displacement of the diaphragm is 0.4 mum and the cutoff frequency is 1000 Hz by a driving voltage of 3 V.
關鍵字microactuator;parylene;thermo-buckled
語言英文
收錄於
會議性質國際
校內研討會地點
研討會時間20060118~20060121
通訊作者
國別中國
公開徵稿Y
出版型式紙本
出處o/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on, pp.873-876
相關連結
Google+ 推薦功能,讓全世界都能看到您的推薦!