期刊論文

標題 Characteristics of proton-exchanged wet etching on z-cut nickel-indiffused lithium niobate
學年 86
學期 2
出版(發表)日期 1998/07/01
作品名稱 Characteristics of proton-exchanged wet etching on z-cut nickel-indiffused lithium niobate
作品名稱(其他語言)
著者 張文清; Chang, Wen-ching; Chang, Shih-jung; Sue, Chao-yung; Hsu, Chia-lu
單位 淡江大學電機工程學系
出版者 Wiley-Blackwell
著錄名稱、卷期、頁數 Microwave and optical technology letters 18(4), pp.250-252
摘要 In this letter, the wet etching technique is utilized to determine the proton exchange (PE) depth of z-cut nickel-indiffused lithium niobate under different nickel indiffusion parameters. It is demonstrated that the existence of nickel atoms reduces the PE depth. While this result was applied to the fabrication of a ridge-type waveguide, the tilt angle of the sidewall on the ridge waveguide was about 70°, which has been successfully increased. © 1998 John Wiley & Sons, Inc. Microwave Opt Technol Lett 18: 250–252, 1998.
關鍵字
語言 英文
ISSN 0895-2477
期刊性質 國內
收錄於
產學合作
通訊作者
審稿制度
國別 中華民國
公開徵稿
出版型式 ,電子版