期刊論文

學年 103
學期 1
出版(發表)日期 2014-09-01
作品名稱 On Deriving Surface Tension Force in MEMS
作品名稱(其他語言)
著者 Yang, Lung-Jieh; Liu, Kuan-Chun; Lin, Wei-Chung
單位 淡江大學機械與機電工程學系
出版者 New Taipei City: Tamkang University
著錄名稱、卷期、頁數 Journal of Applied Science and Engineering 17(3), p.223-230
摘要 This paper presents the comparison between the force balance method and the surface energy method in deriving surface tension forces of some microelectromechanical systems (MEMS) problems. For studying the force balance of the capillary rise in the wick structure of heat pipes or heat spreaders, not only the surface tension at the three-phase interfaces but also the free surfaces should be carefully considered. Meanwhile the intrinsic scalar quantity of surface energy method proves its systematic feature without too much physical insight into the surface tension issues. Finally the authors used the surface energy method to study the capillary stiction of a cantilever beam during its drying process. A surface tension-driven cantilever array using for flapping micro-air-vehicles (FMAVs) is exemplified to justify the theoretical prediction in a static manner.
關鍵字 Surface Tension;Free Surface;Cantilever;Stiction
語言 en_US
ISSN 1560-6686
期刊性質 國外
收錄於 EI ESCI
產學合作
通訊作者 楊龍杰
審稿制度
國別 TWN
公開徵稿
出版型式 ,紙本
相關連結

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