期刊論文

標題 A novel self-aligned fabrication process for nickel-indiffused lithium niobate ridge optical waveguides
學年 87
學期 2
出版(發表)日期 1999/04/01
作品名稱 A novel self-aligned fabrication process for nickel-indiffused lithium niobate ridge optical waveguides
作品名稱(其他語言)
著者 Chang, Wen-ching; Sue, Chao-yung; Hou, Hung-ching; Chang, Shih-jung; Wei, Pei-kuen
單位 淡江大學電機工程學系
出版者 Piscataway: Institute of Electrical and Electronics Engineers (IEEE)
著錄名稱、卷期、頁數 IEEE journal of lightwave technology 17(4), pp.613-620
摘要 A novel self-aligned fabrication process for Ni : LiNbO3 ridge waveguides has been proposed. By using the self-aligned trilayered structure composed of Ni/Ti/Si, the fabrication process is significantly simplified, and takes advantage of suppression of the unwanted planar waveguides and high-coupling efficiency to a single-mode fiber as compared to the conventional processes. Detailed investigations into the characteristics of the ridge waveguides have also proved to be informative under different fabrication parameters. Moreover, the novel self-aligned fabrication process was applied to fabricate a ridge waveguide Mach-Zehnder modulator. The measured half-wave voltage and extinction ratio were 20.5 V and 12 dB (@ 1.3 \mum), and were 4.2 V and 8 dB (@0.6328gm).
關鍵字
語言 英文
ISSN 0733-8724;1558-2213
期刊性質 國外
收錄於
產學合作
通訊作者
審稿制度
國別 美國
公開徵稿
出版型式 紙本;電子版