期刊論文

學年 94
學期 1
出版(發表)日期 2005-09-01
作品名稱 Electro-Hydro-Dynamic (EHD) Micropumps with Electrode Protection by Parylene and Gelatin
作品名稱(其他語言)
著者 Wang, Jiun-min; 楊龍杰; Yang, Lung-jieh
單位 淡江大學機械與機電工程學系
出版者 淡江大學
著錄名稱、卷期、頁數 淡江理工學刊=Tamkang journal of science and engineering 8(3), pp.231-236
摘要 This paper describes an ejection-type electro-hydro-dynamic (EHD) micropump using various types of polymers to protect the electrodes. The polymer layers of parylene and crosslinked gelatin were shown to protect the gold electrodes from electrolytic aging. The pump chip is packaged by the polydimethylsiloxane (PDMS) bonding technique. The results show that the polymer protection layers are successful in prolonging the operation lifetime. They can also provide the inner walls of channels with different surface properties for the working liquid to be driven through.
關鍵字 Parylene;Gelatin;Surface Modification;Electro-Hydro-Dynamic EHD
語言 en
ISSN 1560-6686
期刊性質 國內
收錄於
產學合作
通訊作者
審稿制度
國別 TWN
公開徵稿
出版型式 ,電子版
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機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45669 )

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