期刊論文

標題 Fabrication and test of radial grooved micro heat pipes
學年 91
學期 1
出版(發表)日期 2002/10/01
作品名稱 Fabrication and test of radial grooved micro heat pipes
作品名稱(其他語言)
著者 康尚文; Kang , Shung-wen; Tsai, Sheng-hong; Chen, Hong-chih
單位 淡江大學機械與機電工程學系
出版者 Elsevier
著錄名稱、卷期、頁數 Applied thermal engineering 22(14), pp.1559-1568
摘要 This paper describes the development of radial grooved micro heat pipes (MHPs) with a three-layer structure. The MHPs were designed to allow separation of the liquid and vapor flow to reduce the viscous shear force. The 5×5 cm2 MHP array was fabricated by using bulk micromachining and eutectic bonding techniques on 4-in. (1 0 0) silicon wafers. Experiments were undertaken to evaluate the performance of wafers with three different wafer fill rates at different input powers. We glued a heater below the evaporator section, pumped cold water through a square copper heat exchanger above the heat pipe, and pasted 15 K-type thermocouples on both sides of MHP structure to record the variations of surface temperature. After the evaluation, the MHP with 70% fill rate showed the best performance as compared to samples with smaller fill rates.
關鍵字 Micro heat pipe;Bulk micromachining;Eutectic bonding
語言 英文
ISSN 1359-4311
期刊性質 國內
收錄於
產學合作
通訊作者
審稿制度
國別 中華民國
公開徵稿
出版型式 ,電子版