期刊論文
| 學年 | 92 |
|---|---|
| 學期 | 2 |
| 出版（發表）日期 | 2004-03-01 |
| 作品名稱 | The micro ion drag pump using indium-tin-oxide (ITO) electrodes to resist aging |
| 作品名稱（其他語言） | |
| 著者 | Yang, Lung-Jieh; Wang, Jiun-Min; Huang, Yu-Lin |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Lausanne: Elsevier S.A. |
| 著錄名稱、卷期、頁數 | Sensors and Actuators A: Physical 111(1), pp.118-122 |
| 摘要 | This paper describes a micro ion drag pump, or an ejection type electro-hydrodynamic (EHD) micropump, using indium-tin-oxide (ITO) planar electrodes to deal with the aging problem in a novel way. The ITO film for the electrodes, which are immersing in the working liquid, prolongs the operation duration of the valveless micropump. It also makes anodic bonding easily and feasible in packaging the glass substrate (with ITO) hermetically with the silicon microchannels. Therefore, the scaling down or the miniaturization of ion drag pumps can be achieved herein. The ITO electrodes could drive the ethyl alcohol to have the maximum volumetric flow rate of 356 nl/min by applying a dc voltage of 61 V. More efforts and improvements on the pumping efficiency as well as the long-term stability of the ITO electrodes are acquired correspondingly. |
| 關鍵字 | Aging of materials;Cooling;Electrodes;Electrohydrodynamics;Ethanol;Flow of fluids;Glass;Indium compounds;Liquid crystal displays;Silicon;Volumetric analysis;Electro-hydrodynamic (EHD) micropump;Indium-tin-oxide;Ion drag pump;Pumps |
| 語言 | en |
| ISSN | 0924-4247 |
| 期刊性質 | 國外 |
| 收錄於 | SCI EI |
| 產學合作 | |
| 通訊作者 | Yang, Lung-Jieh |
| 審稿制度 | |
| 國別 | SWZ |
| 公開徵稿 | |
| 出版型式 | 紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45830 ) |