期刊論文

學年 95
學期 1
出版(發表)日期 2006-08-01
作品名稱 Buckled-type valves integrated by parylene micro-tubes
作品名稱(其他語言)
著者 Yang, Lung-Jieh; Wang, Hsin-Hsiung; Wang, Jiun-Min; Liu, Kuan-Chun; Ko, Kai-Chung
單位 淡江大學機械與機電工程學系
出版者 Lausanne: Elsevier S.A.
著錄名稱、卷期、頁數 Sensors and Actuators, A: Physical 130-131(SPEC. ISS.), pp.241-246
摘要 This paper demonstrates a newly developed parylene buckled-type valve with the same working principle of the “buckled straw”. Such a new design of the valve uses the buckled region of plastic tubes as the on/off switch for flow control, and there is no need of adding deformable diaphragms or sealing parts into the valve device. By the merit of its concise mechanism, i.e., a straight pipeline with the region for buckling, the buckled-type valve intrinsically operates with almost zero dead volume. The fabrication sequence of this new valve combines the techniques of sacrificial mould of capillary glass tubes, conformal parylene coating and SU-8 photolithography. A valve device of 1 cm long, 0.8 cm wide and with the buckled micro-tube of 390 μm outer-diameter is demonstrated. The turn-on (flow-closing) angle of this valve verified as 120° experimentally.
關鍵字 Buckling;Capillarity;Formability;Molds;Photolithography;Plastic products;Buckled-type valves;Circular microchannels;Parylene;SU-8;Valves (mechanical)
語言 en
ISSN 0924-4247
期刊性質 國外
收錄於 SCI EI
產學合作
通訊作者 Yang, Lung-Jieh
審稿制度
國別 SWZ
公開徵稿
出版型式 紙本
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