期刊論文
| 學年 | 85 |
|---|---|
| 學期 | 2 |
| 出版（發表）日期 | 1997-03-01 |
| 作品名稱 | The Application of V-Groove Solt-Array Method to the Piezoresistive Pressure Sensors |
| 作品名稱（其他語言） | 應用V型槽深度尺於壓阻式壓力計之製作 |
| 著者 | 楊龍杰; Yang, Lung-jieh; 江振家; Jian, C. C.; 張培仁; Chang, P. Z. ; |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Taipei : Chinese Institute of Chemical Engineers |
| 著錄名稱、卷期、頁數 | Journal of the Chinese Institute of Engineers=中國工程學刊 20(3), pp.335-347 |
| 摘要 | This paper describes a simple method to identify the membrane thickness of the piezoresistive pressure sensor by the so-called “slotarray” which has been made in advance on the wafers before sensor fabrication. Such a method can be applied as a substitute for other etch-stop techniques with micrometer-resolution. The results can also be used to check the uniformity of pressure sensors and give a guideline for further improvements in the batch process of silicon bulk micromachining. A series of pressure sensors with a chip size of 3×3×0.2mm3 were presented as the examples of the V-groove slot-array method. The finite element method (FEM) software ANSYS was accessed to predict the stress and resistance change of the sensors. The new pressure sensors with stiffened-bosses are tested and had a best sensitivity of 9.0 mV/atm/V and a non-linearity less than 1%. |
| 關鍵字 | piezoresistive;pressure sensor;V-groove |
| 語言 | en |
| ISSN | 0253-3839 |
| 期刊性質 | 國內 |
| 收錄於 | |
| 產學合作 | |
| 通訊作者 | |
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| 國別 | TWN |
| 公開徵稿 | |
| 出版型式 | 紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/65396 ) |