期刊論文

標題 Fabrication and investigation of PDMS micro-diffuser/nozzle
學年 96
學期 2
出版(發表)日期 2008/05/01
作品名稱 Fabrication and investigation of PDMS micro-diffuser/nozzle
作品名稱(其他語言)
著者 Kang, Shung-wen; Chen, Yu-tang; Lee, Sheng-hua
單位 淡江大學機械與機電工程學系
出版者 Lausanne: Elsevier S.A.
著錄名稱、卷期、頁數 Journal of Materials Processing Technology198, pp.478-484
摘要 This study presents reports on the fabrication and testing of micro-nozzle/diffuser with curved profile boundary. In this paper, different polymers are used for the fabrication of micro-nozzle/diffuser, SU-8 negative bone photo-resist is introduced for the molding structure, and polydimethylsiloxane (PDMS) is used for the structure of nozzle/diffuser. The structure is then bonded with glass by using low-temperature bonding technique. Through measurement of the pressure and flow, the analysis and investigation of fluid dynamics characteristics are then achieved. The experimental data shows that for a given Reynolds number, the pressure loss for the diffuser is lower than that of the nozzle due to a difference in the momentum change. Furthermore, the results which indicate the pressure loss coefficients for both nozzle and diffuser decrease with the Reynolds number show a good agreement with the predicted results. In sum, the theoretical analysis and design basis from this study can then be formulated as the reference and application need in the fabrication of micro-nozzle/diffuser. (c) 2007 Elsevier B.V All rights reserved.
關鍵字 SU-8; molding structure; PDMS; low-temperature bonding technique; pressure loss coefficient
語言 英文
ISSN 0924-0136
期刊性質
收錄於 SCI;EI
產學合作
通訊作者
審稿制度
國別 瑞士
公開徵稿
出版型式