期刊論文
| 學年 | 99 |
|---|---|
| 學期 | 1 |
| 出版（發表）日期 | 2010-10-01 |
| 作品名稱 | On gas-permeation in PDMS |
| 作品名稱（其他語言） | |
| 著者 | Yang, Lung-Jieh |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Bristol: Institute of Physics Publishing Ltd. |
| 著錄名稱、卷期、頁數 | Journal of Micromechanics and Microengineering 20(11), 115033(7pages) |
| 摘要 | A theoretical model of gas permeation in polydimethylsiloxane (PDMS) is conducted for two prior works involving MEMS sensors and actuators. The issue for modeling a sensor is about using PDMS slabs to replace Pyrex glass as the packaging substrate for bulk-micromachined pressure sensors. The leakage pressure due to gas permeation in PDMS reveals the time-varying behavior of exponential decay. The issue for modeling an actuator is the flow rate in a PDMS-based gas permeation pump. The nonlinear dependence of the flow rate with the diffusion area can be explained by this model. The prediction of this theoretical result is therefore in qualitative agreement with two previous experimental data sets by a conventional curve-fitting technique. |
| 關鍵字 | |
| 語言 | en |
| ISSN | 0960-1317; 1361-6439 |
| 期刊性質 | 國外 |
| 收錄於 | SCI EI |
| 產學合作 | |
| 通訊作者 | Yang, Lung-Jieh |
| 審稿制度 | |
| 國別 | GBR |
| 公開徵稿 | |
| 出版型式 | |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/60550 ) |