期刊論文

學年 97
學期 1
出版(發表)日期 2008-08-01
作品名稱 The Effect of Ion Implantation on Field Emission Property of Nanodiamond Films
作品名稱(其他語言)
著者 Chen, Huang-chin; Palnitkar, Umesh; Niu, Huan; Cheng, Hsiu-fung; 林諭男; Lin, I-nan
單位 淡江大學物理學系
出版者 American Scientific Publishers
著錄名稱、卷期、頁數 Journal of Nanoscience and Nanotechnology 8(8), pp.4141-4145
摘要 Nanocrystalline diamond films prepared by microwave plasma enhanced chemical vapor deposition (MPECVD) were implanted using 110 keV nitrogen ions under fluence ranging from 10(13)-10(14) ions/cm2. Scanning Electron Microscopy (SEM) and Raman spectroscopy were used to analyze the changes in the surface of the films before and after ion implantation. Results show that with nitrogen ion implantation in nanocrystalline diamond film cause to decrease in diamond crystallinity. The field emission measurement shows a sharp increase in current density with increase in dose. The ion implantation also alters the turn on field. It is observed that the structural damage caused by ion implantation plays a significant role in emission behaviour of nanocrystalline diamonds.
關鍵字
語言 en
ISSN 1533-4880
期刊性質 國外
收錄於
產學合作
通訊作者
審稿制度
國別 USA
公開徵稿
出版型式 ,電子版
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